Tantalum target info

Tantalum target

uniform grain size, and very good straightness.

Product details

Tantalum target,       Tantalum sputtering targets,      Tantalum- tungsten Alloy targets

Material:RO5200, RO5400, RO5252(Ta-2.5W), RO5255(Ta-10W)
Size: circular targets:Diameter  15mm up to 400mm x Thickness 3mm up to 28mm
rectangular targets:Thickness 1mm up to 40mm x Width up to 1000mm x Length up to 3000mm

Table 1: technology  parameter

Grade

3N, 3N5, 4N, with Ta 99.99%min

Recrystallization

95%min

Grain size

ASTM 4 or finer

Surface finish

16Rms max. or Ra 0.4 ( RMS64 or better)

Flatness

0.1mm or 0.15% max

Tolerance

+/-0.010″ on all dimensions

Table 1. Chemical composition:

Tantalum target